Gutmann, Ronald J.: search on Z-Library

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1

[Integrated Circuits and Systems] Wafer Level 3-D ICs Process Technology ||

Tan, Chuan Seng, Gutmann, Ronald J., Reif, L. Rafael

Year:

2008

Language:

english

File:

PDF, 14.21 MB

english, 2008

2

Low-temperature silicon wafer bonding based on Ti∕Si solid-state amorphization

Yu, Jian, Wang, Yinmin, Lu, Jian-Qiang, Gutmann, Ronald J.

Journal:

Applied Physics Letters

Year:

2006

Language:

english

File:

PDF, 654 KB

english, 2006

3

Land use change: complexity and comparisons

Rindfuss, Ronald R., Entwisle, Barbara, Walsh, Stephen J., An, Li, Badenoch, Nathan, Brown, Daniel G., Deadman, Peter, Evans, Tom P., Fox, Jefferson, Geoghegan, Jacqueline, Gutmann, Myron, Kelly, Magg

Journal:

Journal of Land Use Science

Year:

2008

Language:

english

File:

PDF, 122 KB

english, 2008

4

Chemical-Mechanical Planarization of Low-k Polymers for Advanced IC Structures

Borst, Christopher L., Thakurta, Dipto G., Gill, William N., Gutmann, Ronald J.

Journal:

Journal of Electronic Packaging

Year:

2002

Language:

english

File:

PDF, 432 KB

english, 2002

5

Chemical-mechanical polishing of copper with oxide and polymer interlevel dielectrics

Ronald J. Gutmann, Joseph M. Steigerwald, Lu You, David T. Price, Jan Neirynck, David J. Duquette, Shyam P. Murarka

Journal:

Thin Solid Films

Year:

1995

Language:

english

File:

PDF, 608 KB

english, 1995

6

Thermal stability of on-chip copper interconnect structures

Ronald J. Gutmann, T.Paul Chow, Alain E. Kaloyeros, William A. Lanford, Shyam P. Muraka

Journal:

Thin Solid Films

Year:

1995

Language:

english

File:

PDF, 1.07 MB

english, 1995

7

NANOSYSTEMS UTILIZING THREE-DIMENSIONAL INTEGRATION AND GAS DIELECTRICS FOR ENHANCED SYSTEM PERFORMANCE

Wade, Thomas E., Gutmann, Ronald J.

Journal:

Technology & Innovation

Year:

2010

Language:

english

File:

PDF, 8.60 MB

english, 2010

8

Chemical Mechanical Planarization of Microelectronic Materials || Post-CMP Cleaning

Steigerwald, Joseph M., Murarka, Shyam P., Gutmann, Ronald J.

Year:

1997

Language:

english

File:

PDF, 1.54 MB

english, 1997

9

Damascene copper interconnects with polymer ILDs

David T Price, Ronald J Gutmann, Shyam P Murarka

Journal:

Thin Solid Films

Year:

1997

Language:

english

File:

PDF, 685 KB

english, 1997

10

Mechanisms of Low-Temperature Ti/Si-Based Wafer Bonding

Yu, Jian, Wang, Yinmin, Haberl, Arthur W., Bakhru, Hassa, Lu, Jian-Qiang, Gutmann, Ronald J.

Journal:

MRS Proceedings

Year:

2005

Language:

english

File:

PDF, 368 KB

english, 2005

11

Nitrogen vs. Phophorus as Implant Species for High-Voltage Lateral RESURF MOSFETs on 4H-SiC

Chatty, K., Banerjee, S., Chow, T.P., Gutmann, Ronald J.

Journal:

Materials Science Forum

Year:

2000

Language:

english

File:

PDF, 314 KB

english, 2000

12

Design and Implementation of RESURF MOSFETs in 4H-SiC

Banerjee, S., Chatty, K., Chow, T.P., Gutmann, Ronald J.

Journal:

Materials Science Forum

Year:

2001

File:

PDF, 355 KB

2001

13

Integration of copper multilevel interconnects with oxide and polymer interlevel dielectrics

Ronald J. Gutmann, T.Paul Chow, S. Lakshminarayanan, David T. Price, Joseph M. Steigerwald, Lu You, Shyam P. Murarka

Journal:

Thin Solid Films

Year:

1995

Language:

english

File:

PDF, 895 KB

english, 1995

14

Chemical-Mechanical polishing of parylene- n films: evaluation by X-Ray photoelectron spectroscopy and atomic force microscopy

G. -R. Yang, Y. -P. Zhao, Jan M. Neirynck, Shyam P. Murarka, Ronald J. Gutmann

Journal:

Journal of Electronic Materials

Year:

1997

Language:

english

File:

PDF, 688 KB

english, 1997

15

Chemical-Mechanical Polishing of Polymer Films: Comparison of Benzocyclobutene(BCB) and Parylene-N Films by XPS and AFM

Yang, G.-R., Zhao, Y.-P., Neirynck, Jan M., Murarka, Shyam P., Gutmann, Ronald J.

Journal:

MRS Proceedings

Year:

1997

Language:

english

File:

PDF, 611 KB

english, 1997

16

Chemical Mechanical Planarization of Microelectronic Materials || Frontmatter

Steigerwald, Joseph M., Murarka, Shyam P., Gutmann, Ronald J.

Year:

1997

Language:

english

File:

PDF, 1.01 MB

english, 1997

17

Electrical Properties of Sipos Films Deposited on Crystalline Silicon

Chuang, Tien-Min, Rose, Kenneth, Gutmann, Ronald J.

Journal:

MRS Proceedings

Year:

1989

Language:

english

File:

PDF, 306 KB

english, 1989

18

Chemical Mechanical Planarization of Microelectronic Materials || Oxide CMP Processes Mechanisms and Models

Steigerwald, Joseph M., Murarka, Shyam P., Gutmann, Ronald J.

Year:

1997

Language:

english

File:

PDF, 2.93 MB

english, 1997

19

Chemical Mechanical Planarization of Microelectronic Materials || CMP of Other Materials and New CMP Applications

Steigerwald, Joseph M., Murarka, Shyam P., Gutmann, Ronald J.

Year:

1997

Language:

english

File:

PDF, 2.78 MB

english, 1997

20

XPS and AFM study of chemical mechanical polishing of silicon nitride

G.-R Yang, Y.-P Zhao, Y.Z Hu, T Paul Chow, Ronald J Gutmann

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 370 KB

english, 1998

21

Radiation Effects on Signal and Noise Characteristics of GaAs MESFET Microwave Amplifiers

Borrego, Jose M., Gutmann, Ronald J., Moghe, Sanjay B.

Journal:

IEEE Transactions on Nuclear Science

Year:

1979

Language:

english

File:

PDF, 890 KB

english, 1979

22

Three-dimensional wafer-scale copper chemical–mechanical planarization model

Dipto G. Thakurta, Donald W. Schwendeman, Ronald J. Gutmann, Sadasivan Shankar, Lei Jiang, William N. Gill

Journal:

Thin Solid Films

Year:

2002

Language:

english

File:

PDF, 687 KB

english, 2002

23

Chemical–mechanical polishing of SiOC organosilicate glasses: the effect of film carbon content

Christopher L. Borst, Vincent Korthuis, Gregory B. Shinn, J.D. Luttmer, Ronald J. Gutmann, William N. Gill

Journal:

Thin Solid Films

Year:

2001

Language:

english

File:

PDF, 961 KB

english, 2001

24

Pad porosity, compressibility and slurry delivery effects in chemical-mechanical planarization: modeling and experiments

Dipto G Thakurta, Christopher L Borst, Donald W Schwendeman, Ronald J Gutmann, William N Gill

Journal:

Thin Solid Films

Year:

2000

Language:

english

File:

PDF, 671 KB

english, 2000

25

Chemical-mechanical polishing of PECVD silicon nitride

Yong Zhong Hu, G.-R. Yang, T. Paul Chow, Ronald J. Gutmann

Journal:

Thin Solid Films

Year:

1996

Language:

english

File:

PDF, 179 KB

english, 1996

26

Hysteresis in Transfer Characteristics in 4H-SiC Depletion/Accumulation-Mode MOSFETs

Chatty, K., Banerjee, S., Chow, T.P., Gutmann, Ronald J.

Journal:

Materials Science Forum

Year:

2002

File:

PDF, 302 KB

2002

27

Thermal Cycling Effects on Critical Adhesion Energy and Residual Stress in Benzocyclobutene-Bonded Wafers

Kwon, Yongchai, Seok, Jongwon, Lu, Jian-Qiang, Cale, Timothy S., Gutmann, Ronald J.

Journal:

Journal of The Electrochemical Society

Year:

2005

Language:

english

File:

PDF, 1.03 MB

english, 2005

28

[IEEE 26th European Microwave Conference, 1996 - Prague, Czech Republic (1996.10.4-1996.10.6)] 26th European Microwave Conference, 1996 - Simulation of slow wave mode propagation using the finite element method

Kucera, Jakub J, Gutmann, Ronald J.

Year:

1996

Language:

english

File:

PDF, 7.82 MB

english, 1996

29

The addition of surfactant to slurry for polymer CMP: effects on polymer surface, removal rate and underlying Cu

Jan M. Neirynck, G.-R. Yang, Shyam P. Murarka, Ronald J. Gutmann

Journal:

Thin Solid Films

Year:

1996

Language:

english

File:

PDF, 398 KB

english, 1996

30

Self-Aligned N+ Polysilicon-Gate GaN MOSFETs

Matocha, Kevin, Chow, T.P., Gutmann, Ronald J.

Journal:

Materials Science Forum

Year:

2004

Language:

english

File:

PDF, 283 KB

english, 2004

31

930, 170Ω.cm2 Lateral Two-Zone RESURF MOSFETs in 4H-SiC with NO Annealing

Wang, W., Banerjee, S., Chow, T.P., Gutmann, Ronald J.

Journal:

Materials Science Forum

Year:

2004

Language:

english

File:

PDF, 353 KB

english, 2004

32

Chemical Mechanical Planarization of Microelectronic Materials ||

Steigerwald, Joseph M., Murarka, Shyam P., Gutmann, Ronald J.

Year:

1997

File:

PDF, 22.97 MB

1997

33

[Integrated Circuits and Systems] Wafer Level 3-D ICs Process Technology || Direct Hybrid Bonding

Tan, Chuan Seng, Gutmann, Ronald J., Reif, L. Rafael

Year:

2008

Language:

english

File:

PDF, 738 KB

english, 2008

34

Damascene-Patterned Metal-Adhesive (Cu-BCB) Redistribution Layers

Gutmann, Ronald J., McMahon, J. Jay, Lu, Jian-Qiang

Journal:

MRS Proceedings

Year:

2006

Language:

english

File:

PDF, 582 KB

english, 2006

35

Hall Measurements of Inversion and Accumulation-Mode 4H-SiC MOSFETs

Chatty, K., Banerjee, S., Chow, T.P., Gutmann, Ronald J., Arnold, Emil, Alok, Dev

Journal:

Materials Science Forum

Year:

2002

File:

PDF, 306 KB

2002

36

Chemical Mechanical Planarization of Microelectronic Materials || Mechanical and Electrochemical Concepts for CMP

Steigerwald, Joseph M., Murarka, Shyam P., Gutmann, Ronald J.

Year:

1997

Language:

english

File:

PDF, 4.04 MB

english, 1997

37

Evaluation of BCB Bonded and Thinned Wafer Stacks for Three-Dimensional Integration

Kwon, Yongchai, Jindal, Anurag, Augur, Rod, Seok, Jongwon, Cale, Timothy S., Gutmann, Ronald J., Lu, Jian-Qiang

Journal:

Journal of The Electrochemical Society

Year:

2008

Language:

english

File:

PDF, 956 KB

english, 2008

38

Surface Kinetics Model for SiLK Chemical Mechanical Polishing

Borst, Christopher L., Thakurta, Dipto G., Gill, William N., Gutmann, Ronald J.

Journal:

Journal of The Electrochemical Society

Year:

2002

Language:

english

File:

PDF, 297 KB

english, 2002

39

Fine Keyed Alignment and Bonding for Wafer-Level 3D ICs

Lee, Sang Hwui, Niklaus, Frank, McMahon, J. Jay, Yu, Jian, Kumar, Ravi J., Li, Hui-feng, Gutmann, Ronald J., Cale, Timothy S., Lu, J.-Q.

Journal:

MRS Proceedings

Year:

2006

Language:

english

File:

PDF, 435 KB

english, 2006

40

Radiation Effects on GaAs MESFETs

Borrego, Jose M., Gutmann, Ronald J., Moghe, Sanjay B., Chudzicki, Mark J.

Journal:

IEEE Transactions on Nuclear Science

Year:

1978

Language:

english

File:

PDF, 1.42 MB

english, 1978

41

Myelin quantification with MRI: A systematic review of accuracy and reproducibility

van der Weijden, Chris W.J., GarcÃa, David VÃ¡llez, Borra, Ronald J.H., Thurner, Patrick, Meilof, Jan F., van Laar, Peter-Jan, Dierckx, Prof Rudi A.J.O., Gutmann, Ingomar W., de Vries, Erik F.J.

Journal:

Year:

2020

File:

PDF, 34 KB

2020

42

Continued efficacy and safety of subcutaneous apomorphine in patients with advanced Parkinson's disease

Ronald F. Pfeiffer, Ludwig Gutmann, Keith L. Hull Jr., Peter B. Bottini, James H. Sherry

Journal:

Parkinsonism & Related Disorders

Year:

2007

Language:

english

File:

PDF, 220 KB

english, 2007

43

Modeling Thermal Stresses in 3-D IC Interwafer Interconnects

Zhang, Jing, Bloomfield, Max O., Lu, Jian-qiang, Gutmann, Ronald J., Cale, Timothy S.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2006

Language:

english

File:

PDF, 2.22 MB

english, 2006

44

Critical Adhesion Energy at the Interface Between Benzocyclobutene and Silicon Nitride Layers

Kwon, Yongchai, Seok, Jongwon, Lu, Jian-Qiang, Cale, Timothy S., Gutmann, Ronald J.

Journal:

Journal of The Electrochemical Society

Year:

2007

Language:

english

File:

PDF, 584 KB

english, 2007

45

Copper Metallization Manufacturing Issues for Future ICs

Gutmann, Ronald J., Paul Chow, T., Gill, William N., Kaloyeros, Alain E., Lanford, William A., Murarka, Shyam P.

Journal:

MRS Proceedings

Year:

1994

Language:

english

File:

PDF, 2.85 MB

english, 1994

46

Gallium Nitride Power Device Design Tradeoffs

Matocha, Kevin, Chow, T.P., Gutmann, Ronald J.

Journal:

Materials Science Forum

Year:

2002

File:

PDF, 287 KB

2002

47

Low Dielectric Constant Polymers For On-Chip Interlevel Dielectrics With Copper Metallization

Gutmann, Ronald J., Chow, T. Paul, Duquette, David J., Lu, Toh-Ming, Mcdonald, John F., Murarka, Shyam P.

Journal:

MRS Proceedings

Year:

1995

Language:

english

File:

PDF, 3.65 MB

english, 1995

48

Radiation Effects on Power GaAs MESFET Amplifiers

Moghe, Sanjay B., Gutmann, Ronald J., Borrego, Jose M.

Journal:

IEEE Transactions on Nuclear Science

Year:

1982

Language:

english

File:

PDF, 570 KB

english, 1982

49

Special Issue on Reliability of Photovoltaic Devices & Systems Preface

Gutmann, Ronald J.

Journal:

IEEE Transactions on Reliability

Year:

1982

Language:

english

File:

PDF, 1.18 MB

english, 1982

50

Comparison of Nitrogen and Phosphorus Implanted, Planar, High-Voltage 4H-SiC Junction Rectifiers

Chatty, K., Khemka, V., Chow, T.P., Gutmann, Ronald J.

Journal:

Materials Science Forum

Year:

2000

File:

PDF, 357 KB

2000

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